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The effect of mass loading on spurious modes in micro-resonators


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Authors

Daly, R 
Thiruvenkatanathan, P 
Seshia, AA 

Abstract

jats:pDissipation mechanisms severely compromise the performance of micro-resonator based sensors. In this letter, we specifically examine the shift in resonant frequency of spurious modes towards the mode of interest during mass loading. This can result in modal interaction that degrades the response of the sensor. However, by understanding and controlling this effect we can overcome this key barrier to micro-resonator applications.</jats:p>

Description

Keywords

40 Engineering, 4009 Electronics, Sensors and Digital Hardware

Journal Title

Applied Physics Letters

Conference Name

Journal ISSN

0003-6951
1077-3118

Volume Title

107

Publisher

AIP Publishing